by Samuel Polo, Eva María Rubio, Marta María Marín, José Manuel Sáenz de Pipaón
Abstract
This paper presents a systematic review of the most relevant studies in the field of microelectromechanical systems (MEMS), using the PRISMA methodology to select and analyze the literature. The scope includes design and development of transducers, sensors or piezoelectric generators, together with advanced fabrication techniques such as lithography, chemical vapour deposition or silicon micromachining. Conventional materials used in MEMS technologies and innovative applications of emerging materials such as graphene will also be discussed. Finally, the continuous evolution of these systems will be highlighted, focusing on their integration into Industry 4.0 and progress towards further miniaturization.
Video presentation
Presenting author
| Name: Affiliation: Email: | Samuel Polo Universidad Nacional de Educación a Distancia (UNED), Spain spolo64@alumno.uned.es | |
