{"id":5258,"date":"2025-07-17T12:50:24","date_gmt":"2025-07-17T10:50:24","guid":{"rendered":"https:\/\/cirpicme.org\/?page_id=5258"},"modified":"2025-07-17T12:50:30","modified_gmt":"2025-07-17T10:50:30","slug":"micro-electromechanical-systems-mems-a-systematic-review-of-the-most-influential-studies","status":"publish","type":"page","link":"https:\/\/cirpicme.org\/index.php\/video-presentations-session\/micro-electromechanical-systems-mems-a-systematic-review-of-the-most-influential-studies\/","title":{"rendered":"Micro-Electromechanical Systems (MEMS): A Systematic Review of the Most Influential Studies"},"content":{"rendered":"\n<p class=\"wp-block-paragraph\"><em>by <em><em><em><em>Samuel Polo, Eva Mar\u00eda Rubio, Marta Mar\u00eda Mar\u00edn, Jos\u00e9 Manuel S\u00e1enz de Pipa\u00f3n<\/em><\/em><\/em><\/em><\/em><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Abstract<\/strong><\/p>\n\n\n\n<p class=\"wp-block-paragraph\">This paper presents a systematic review of the most relevant studies in the field of microelectromechanical systems (MEMS), using the PRISMA methodology to select and analyze the literature. The scope includes design and development of transducers, sensors or piezoelectric generators, together with advanced fabrication techniques such as lithography, chemical vapour deposition or silicon micromachining. Conventional materials used in MEMS technologies and innovative applications of emerging materials such as graphene will also be discussed. Finally, the continuous evolution of these systems will be highlighted, focusing on their integration into Industry 4.0 and progress towards further miniaturization.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<div style=\"height:20px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Video presentation<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-video\"><video height=\"1080\" style=\"aspect-ratio: 1920 \/ 1080;\" width=\"1920\" controls src=\"https:\/\/cirpicme.org\/wp-content\/uploads\/2025\/07\/Samuel_Polo.mp4\"><\/video><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Presenting author<\/strong><\/p>\n\n\n\n<figure class=\"is-style-stripes wp-block-table\"><table class=\"has-background\" style=\"background-color:#f3f4f5\"><tbody><tr><td><\/td><td><\/td><td><\/td><\/tr><tr><td><\/td><td><strong>Name:<\/strong><br><br><strong>Affiliation:<\/strong><br><br><strong>Email:<\/strong><\/td><td>Samuel Polo<br><br>Universidad Nacional de Educaci\u00f3n a Distancia (UNED), Spain<br><br><a href=\"mailto:BenniPS@cardiff.ac.uk\"><\/a><a href=\"mailto:henriette.kunze@iwu.fraunhofer.de\"><a href=\"mailto:spolo64@alumno.uned.es\">spolo64@alumno.uned.es<\/a><\/a><\/td><\/tr><tr><td><\/td><td><\/td><td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n","protected":false},"excerpt":{"rendered":"<p>by Samuel Polo, Eva Mar\u00eda Rubio, Marta Mar\u00eda Mar\u00edn, Jos\u00e9 Manuel S\u00e1enz de Pipa\u00f3n Abstract This paper presents a systematic review of the most relevant studies in the field of microelectromechanical systems (MEMS), using the PRISMA methodology to select and analyze the literature. The scope includes design and development of&#8230;<\/p>\n<p> <a class=\"continue-reading-link\" href=\"https:\/\/cirpicme.org\/index.php\/video-presentations-session\/micro-electromechanical-systems-mems-a-systematic-review-of-the-most-influential-studies\/\"><span>Continue reading<\/span><i class=\"crycon-right-dir\"><\/i><\/a> <\/p>\n","protected":false},"author":4,"featured_media":0,"parent":4281,"menu_order":0,"comment_status":"open","ping_status":"closed","template":"","meta":{"nf_dc_page":"","om_disable_all_campaigns":false,"_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"footnotes":""},"class_list":["post-5258","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/cirpicme.org\/index.php\/wp-json\/wp\/v2\/pages\/5258","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cirpicme.org\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/cirpicme.org\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/cirpicme.org\/index.php\/wp-json\/wp\/v2\/users\/4"}],"replies":[{"embeddable":true,"href":"https:\/\/cirpicme.org\/index.php\/wp-json\/wp\/v2\/comments?post=5258"}],"version-history":[{"count":1,"href":"https:\/\/cirpicme.org\/index.php\/wp-json\/wp\/v2\/pages\/5258\/revisions"}],"predecessor-version":[{"id":5259,"href":"https:\/\/cirpicme.org\/index.php\/wp-json\/wp\/v2\/pages\/5258\/revisions\/5259"}],"up":[{"embeddable":true,"href":"https:\/\/cirpicme.org\/index.php\/wp-json\/wp\/v2\/pages\/4281"}],"wp:attachment":[{"href":"https:\/\/cirpicme.org\/index.php\/wp-json\/wp\/v2\/media?parent=5258"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}